Vacuum & Surface Science Laboratory

08 Mar 2017

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Vacuum Science Expertise

• Advanced modelling of gas flow in vacuum systems
  
• Vacuum system design
  
• Extreme High Vacuum (XHV) techniques and applications
  
• Instrumentation and vacuum metrology
• Leading ultra-high vacuum levels​
  
• Full solution including modelling, cleaning, processing and validation
  

​Surface Science Facilities

Thin films and multilayer coatings:

• Physical Vapour Deposition - PVD​
  
• Chemical Vapour Deposition - CVD
  
• Molecular Beam Epitaxy
  
• Atomic Layer Deposition - ALD
  

Analysis techniques​:

• Rutherford Backscattering - RBS
  
• Nuclear Reaction Analysis - NRA
  
• Medium and Low Energy Ion Scattering - MEIS and LEIS
  
• Auger Electron Spectroscopy - AES
  
• X-Ray Photoelectron Spectroscopy - XPS
  
• Secondary Ion Mass Spectroscopy - SIMS
  
• Scanning Electron Microscopy - SEM
  
• Tunnelling Electron Microscopy - TEM​​​
  

​Contact

F​or further information please email AMICI@stfc.ac.uk